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专利名称：OPTICAL MICROSWITCH HAVING
ELECTROSTATIC MICROACTUATOR ANDMETHOD FOR USE THEREOF
发明人：JERMAN, JOHN, H.,GRADE, JOHN, D.,DRAKE,
JOSEPH, D.
申请号：EP99902194申请日：19990112公开号：EP1055281A4公开日：20030611
摘要：An optical microswitch (104) for use with a laser beam that extends along a pathcomprising a body (213) having an inlet port (150) adapted to receive the laser beam anda plurality of outlet ports (151). A plurality of mirrors (103) coupled to a plurality ofmicromotors (180a, 180b) are carried by the body. The micromotors selectively move themirrors from a first position out of the path of the laser beam to a second position intothe path of the laser beam to direct the laser beam to one of the outlet ports. Each ofthe micromotors has at least one electrostatically-driven comb assembly therein formoving the respective mirror to one of the first and second positions. A controller iselectrically coupled to the micromotors for providing control signals to the micromotors.
申请人：IOLON, INC.
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